http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
Outgoing Links
| Predicate | Object |
|---|---|
| concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| level | 9^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | H01L21/68 |
| modified | 2021-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for positioning, orientation or alignment |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67 |
Incoming Links
Total number of triples: 4695.