| abstract |
There are instruments used for handlingna substrate in a clean room at room temperature andnatmospheric pressure, which contain a resin base and atnleast one additive selected from the group consistingnof a lubricant, a plasticizer, an anti-oxidizing agentnand an antistatic agent, and the additives do notngenerate gaseous organic material compound undernconditions of room temperature and atmospheric pressure. |