http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108140590-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2886 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07307 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2887 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-287 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 |
| filingDate | 2016-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108140590-B |
| titleOfInvention | Wafer inspection method and wafer inspection apparatus |
| abstract | The invention provides a wafer inspection method capable of properly receiving a chuck upper end component. After the wafer W is inspected, when the aligner (32) is to receive the chuck upper end member (29), the distance between the chuck upper end member (29) and the chuck base (49) is adjusted by adjusting the tilt of the chuck base (49) so that the distance between the held chuck upper end member (29) and the chuck base (49), i.e., the height of each chuck upper end member, is a height obtained by uniformly adding any value of 0 μm to 200 μm to the height of each chuck upper end member before holding. |
| priorityDate | 2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122034 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415821907 |
Total number of triples: 21.