| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ce15cf617a0f031ed0c2afee09e34338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fe77400488937dc481a561d6969c6ee8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6175b878ee63ba1c1de357fa686005f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cfb0351bed4dc51d813bd013ebed52bf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-37608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-40562 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06K9-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B19-418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B15-00 |
| filingDate |
2008-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46df41d7e084b34a9703766faf8b74c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5765561cf60e47eacd464e493fada145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9488ffa5f18dfa33737b0e50d9600a1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b974cefb17e532434deb17c7d1dae84 |
| publicationDate |
2012-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8135485-B2 |
| titleOfInvention |
Offset correction techniques for positioning substrates within a processing chamber |
| abstract |
A method for aligning a substrate to a process center of a support mechanism is provided. The method includes determining substrate thickness after substrate processing at a plurality of orientations and at a plurality of radial distances from a geometric center of the substrate. The method also includes deriving a set of process rate values from substrate thickness and process duration. The method further includes creating for a process rate an off-centered plot, which represents a substantially concentric circle whose points are a circumference of the off-centered plot having substantially the first process rate. The method yet also includes applying a curve-fitting equation to the off-centered plot to determine a set of parameters. The method yet further includes teaching a set of robot arms the set of parameters, thereby enabling the set of robot arms to align another substrate that is supported by the support mechanism with the process center. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9268089-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014286616-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9939582-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8386064-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016351425-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9966285-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011015774-A1 |
| priorityDate |
2007-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |