| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00 |
| filingDate |
1996-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b34bf0b224882ab1f3f3303a465896b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f89b88e9466c5e4f79d2f0908fa03ba3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_989d03774102abe556e3c08b751e7e1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d50169cefbc0aaef35a232bb0de8699c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_623690ff8f0adbdf3406f78cc9594056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9839b113893483b5ccfff2915ca4c868
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72dbd250a981f24ec298f796b760e218 |
| publicationDate |
1997-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0755066-A1 |
| titleOfInvention |
Electrostatic chuck |
| abstract |
An electrostatic chuck 20 of the present invention is capable of maintaining substantially uniform temperatures across a substrate 30 . The chuck 20 comprises an electrostatic member 35 that includes (i) an insulator 45 covering an electrode 40 , (ii) a substantially planar and conformal contact surface 50 capable of conforming to a substrate 30 , and (iii) conduits 105 terminating at the contact surface 50 for providing heat transfer fluid to the contact surface 50 . Application of a voltage to the electrode 40 of the electrostatic member 35 electrostatically holds the substrate 30 on the conformal contact surface 50 to define an outer periphery 110 having (1) leaking portions 115 where heat transfer fluid leaks out, and (2) sealed portions 130 where heat transfer fluid substantially does not leak out. A fluid flow regulator 135 is provided for flowing heat transfer fluid at different flow rates through the conduits 105 in the electrostatic member 35 to provide (i) first flow rates of heat transfer fluid through the conduits 105 adjacent to the sealed portions 130 of the outer periphery 110 of the electrostatic member 35 , and (ii) second flow rates of heat transfer fluid through the conduits 105 adjacent to the leaking portions 115 , the second flow rates being higher than the first flow rates, to maintain substantially uniform temperatures across the substrate 30 held on the chuck 20 . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1655764-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1655764-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6529362-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010124268-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03046953-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03046953-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7149070-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111855113-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109366207-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010124268-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0863545-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0863545-A2 |
| priorityDate |
1995-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |