| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_358a329cc314c43da9d13d9d90a7db83 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-524
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673 |
| filingDate |
1995-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6947daf69b098fc24c685fa24a6be0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78e9c0cffb81de675395a2f4e9f1d85c |
| publicationDate |
1997-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0663687-B1 |
| titleOfInvention |
Instrument for production of semiconductor and process for production thereof |
| priorityDate |
1994-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |