| abstract |
Disclosed are methods of treating a device-substrate, and support-substrates used therein. The methods may include providing the device-substrate having an integrated circuit, bonding a first top surface of the device-substrate to a support-substrate, and polishing a first bottom surface of the device-substrate. The support-substrates include a second top surface, a second bottom surface opposite to the second top surface, and a sidewall connecting the second top and bottom surfaces. Additionally, the support-substrates further include a grooved portion spaced apart from the sidewall and blocking a crack in the support-substrates occurring from the sidewall. |