http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008306215-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6307e62bbc5f81c5810d78ceb37b47b5 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-35 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2887 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2008-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77fefe8c82978c4872ed4b536b18361f |
| publicationDate | 2008-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008306215-A |
| titleOfInvention | Chuck for probe station |
| abstract | PROBLEM TO BE SOLVED: To provide a chuck in which an upper chuck assembly element supporting a wafer does not lose flatness when a probe is added to the wafer. The chuck includes an upper chuck assembly element 180 having an upper surface 198 adapted to support a wafer, and further between the upper chuck assembly element and a central chuck assembly element 182 below it. A chuck separation device having three independent pins 200, 202, 204 defining a spacing and connected to the upper chuck assembly element 180. The chuck separation device has an insulating U-shaped member 246 having a first surface that presses and engages the upper surface 224 of the central chuck assembly element and a second surface that presses and engages the first surface of the conductive U-shaped member 244. . The second surface of the conductive U-shaped member 244 is pressed against the lower surface of the upper chuck assembly element. The thickness of the first surface of the insulating U-shaped member is less than 1/3 of the thickness of the conductive U-shaped member. [Selection] Figure 13 |
| priorityDate | 2000-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.