http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9966549-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2d503cde889a2c79e3bedad3fb41d4c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5eda1ee8c38c3876708b3c6b38750a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf6c04d2d34e718a6ca6cac3da3ef213 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_653e8fe711e61953a18ca69a4f8688ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_baabb97e1a68890f0afb5fcbbe40dd9e |
| publicationDate | 1999-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-9966549-A1 |
| titleOfInvention | Method and apparatus for dechucking a substrate from an electrostatic chuck |
| abstract | There is provided a method of dechucking from an electrostatic chuck a substrate held by one or more residual forces to the chuck, the method comprising the steps of: (a) reducing a residual chucking force due to the electrostatic chuck polarisation; (b) contracting the chuck with the substrate attached thereto with a plasma for a time sufficient substantially to remove any residual charge from the surface of the substrate and the chuck; and (c) subsequently to, or simultaneously with, step (b) removing the substrate from the chuck. Also disclosed is an apparatus for performing the method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6852990-B1 |
| priorityDate | 1998-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.