| abstract |
It is possible to obtain a substrate holding structure having excellent corrosion resistance and airtightness, having excellent dimensional accuracy and having sufficient durability when mechanical or thermal stress is applied. The holding member 1 as a substrate holding structure according to the present invention includes a ceramic base 2 for holding a substrate, a protective cylinder member 7 bonded to the ceramic base 2, a ceramic base 2, It is provided between the protective cylinder members 7, and the bonding layer 8 which joins the ceramic base 2 and the protective cylinder member 7 is provided. The bonding layer 8 contains 2 mass% or more and 70 mass% or less of rare earth oxide, 10 mass% or more and 78 mass% or less of aluminum oxide, and contain 2 mass% or more and less than 50 mass% of aluminum nitride. In the bonding layer 8, the ratio of rare earth oxide or aluminum oxide is the largest among the three types of components. |