http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070058354-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9503 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S451-914 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-681 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| filingDate | 2006-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0082e2ce7772dab5bbcca44caad90dd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3023d00020610d51391a32b0e4415afb |
| publicationDate | 2007-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20070058354-A |
| titleOfInvention | Positioning method of semiconductor wafer and apparatus using same |
| abstract | Of the light transmitted from the light source, the transmitted light passing through the outer circumferential end of the wafer is detected by the light receiving sensor, and the outer circumferential coordinates of the wafer are obtained using this result. In addition, the center position is obtained using this coordinate group. In addition, the reflected light irradiated from the illuminating device to the outer peripheral portion of the wafer is detected by the optical camera, and the position of the V notch formed on the outer circumference of the wafer is obtained using this detection result. These determinations determine the handling position of the wafer from the center position of the wafer and the position of the V notch. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110031108-A |
| priorityDate | 2005-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.