| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ffc382be3766850faac918c9335a583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fe3f27d5631fa31053d380ae5a65553d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9705e7586ed4d72f004941dd6f0999fb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J1-4257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0068 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2011-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc60df4c131e1d43d530ca298bffb754
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_989ae410317cbcaa3a345c80e557f251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6edafef8701a28aa9d1c1bbd50b5c6f1 |
| publicationDate |
2011-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011163329-A2 |
| titleOfInvention |
Extending the lifetime of a deep uv laser in a wafer inspection tool |
| abstract |
Disclosed herein is a method and apparatus for automatic correction of beam waist position drift in real time, using wafer inspection data taken during normal tool operation. Also disclosed herein is an improved laser astigmatism corrector for use either internal or external to the laser. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107924561-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9846933-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107924561-A |
| priorityDate |
2010-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |