http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010076379-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 2001-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00e9d55fe74b781f59fcb680e8a85eb7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4e94aad6293a175d15f45f7035d2e5b |
| publicationDate | 2001-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20010076379-A |
| titleOfInvention | Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same |
| abstract | The wafer holder 10 includes a structure in which a pair of ceramic substrates 4 sandwich each of the conductor layers 1, 2, and 3. The conductor layers 1, 2, 3 include main body parts 1A, 2A, 3A facing the wafer 20, and withdrawal parts 1B, 2B, 3B drawn out of the main body part for connection with the outside. The main body portions 1A, 2A, 3A and the lead portions 1B, 2B, 3B are arranged on the same plane. Thereby, the wafer holder for a semiconductor manufacturing apparatus which can suppress the distortion by heating and cooling, and is easy to manufacture can be obtained. |
| priorityDate | 2000-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.