| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3025 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
1994-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc7f7883c7ebbf6fb06b5a0f2341e211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc9b1a5e50823da33c6d33264f2baa41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cebcbad5dc6e645570a45c20abb64d37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_094884918cbb9828ffbe6684d745a7f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ac6b35ddcf246e64a71b1b5b41c95cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a4b7c564f7d95d0a94ecb1e6263dea0 |
| publicationDate |
2001-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1119023-A2 |
| titleOfInvention |
Method of holding substrate and substrate holding system |
| abstract |
Present invention provides a method of holding substratenand a substrate holding system where the amount of foreignnsubstances on the back surface can be decreased, and a littlenamount of foreign substances may be transferred from anmounting table to a substrate. The substrate holding systemncomprises a ring-shaped leakage-proof surface having smoothnsurface on the specimen table corresponding to the peripherynof the substrate, a plurality of contact holding portionsnagainst the substrate on the specimen table between thencorresponding position to the periphery of the substrate andnthe corresponding position to the center of the substrate, andnelectrostatic ttraction means for fixing the substrate byncontacting the back surface of the substrate to the ring-shapednleakage-proof surface and the contact holding portions.nThe substrate contacts to the cooling surface at the ring-shapednleakage-proof surface and the contact holding portionnplaced on a position inside the ring-shaped leakage-proofnsurface. The back surface of the substrate and the coolingnsurface do not contact to each other in the large portion ofnthe remaining area. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103943520-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103943520-A |
| priorityDate |
1993-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |