http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103582532-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68707 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q1-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67781 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6776 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67173 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q1-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-00 |
| filingDate | 2012-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103582532-B |
| titleOfInvention | Monobasal treatment system side by side |
| abstract | A kind of for one or more substrate surface that is arranged in fluid being carried out to the system of fluid treatment. This system has: processing section, and it is with framework and have multiple treatment elements on treatment substrate surface the contact substrate surface not in the situation that; And substrate holder assembly, it has multiple substrate holders and transmits between processing section and another location one or more substrate as unit. Substrate holder assembly and substrate holder are attached to processing section framework removedly, and each substrate holder is configured to keep at least one in substrate. Processing section framework has alignment characteristics, alignment characteristics is arranged so that the each substrate holder handing-over of alignment characteristics and substrate holder assembly, and locates each substrate holder with respect to the predetermined characteristic of processing section in mode that can reregistration in the time that each substrate holder and processing section framework correspondingly connect. |
| priorityDate | 2011-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.