| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8381805eba6d034fc77bd230dd02e6e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0113ce858269a52539dc98944ebab99a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d89821f110215617b00171d66e946a43 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S425-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41M1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S425-808 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67282 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41M1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2003-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e7225b22041bb1ebd82c35820c1934b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc16d7b9239427b2983e66685c6da23d |
| publicationDate |
2003-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-03065120-A2 |
| titleOfInvention |
Microcontact printing |
| abstract |
A microcontact printing tool having a print unit including a stamp head with a stamp and a wafer chuck for retaining a substrate. The stamp contained by the stamped head movable relative to the substrate by an actuator and a stage. A plurality of sensors detect the position of the stamp relative to substrate. A method of using the printing tool that includes a real-time feedback for consistent and accurate application of force during the printing of the substrate. The stamp head includes a pressure chamber carrying the stamp. The stamp backing is deflected prior to contact of the stamp with the substrate to form a minimum point and the stamp backing and the stamp is returned to a plane to create a printing propagation contact. An apparatus and method of producing the stamp on a stamp backing. The apparatus has a master backing and a stamping backing in close proximity and the stamp material drawn in through a vacuum. The stamp is separated from the master by use of a parting fluid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102616031-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005036509-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2058107-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006008464-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005036509-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2450175-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8506867-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2457250-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4120325-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1972996-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014037044-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8591794-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10414087-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3901698-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180066278-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104704425-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011011141-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015534721-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101986473-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104704425-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8142701-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017130678-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10005225-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2457250-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1844491-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1844491-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009137286-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10994470-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1927462-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2940526-A1 |
| priorityDate |
2002-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |