http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102420154-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-681 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45551 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68771 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2011-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102420154-B |
| titleOfInvention | Substrate position detection apparatus, film formation device and substrate position detection method |
| abstract | The invention provides substrate position detection apparatus, film formation device and substrate position detection method.This substrate position detection method comprises following operation: make pedestal move and make substrate-placing portion be arranged in the camera watch region of camera head; Detect two the 1st position detection marks, these two the 1st position detection marks are arranged in the mode of the camera watch region being positioned at camera head in container handling, and the 1st vertical bisecting line of these two the 1st position detection marks is by the pivot of pedestal; Detect two the 2nd position detection marks, these two the 2nd position detection marks are arranged at pedestal to detect substrate-placing portion, and the 2nd vertical bisecting line of these two the 2nd position detection marks is by the pivot of pedestal and the center in substrate-placing portion; Judge whether substrate-placing portion is positioned at the scope of regulation according to two the 1st position detection marks detected and two the 2nd position detection marks. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109153933-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110459499-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109153933-B |
| priorityDate | 2010-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.