http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5916689-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31699
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S156-914
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249955
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249956
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
filingDate 1996-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1999-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69a1ee84567050b7c075737e9d0385b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9ec0b055d14dd615324a182a5944f21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ece8a6b4af645a9e64a5fb7910122b49
publicationDate 1999-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5916689-A
titleOfInvention Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect
abstract An electrostatic chuck including a pedestal having a conductive upper surface; and a layer of plasma-sprayed material formed on the upper surface of the pedestal and defining a surface onto which a substrate is placed during use, wherein the plasma-sprayed material exhibits the Johnson-Rahbeck effect when a bias is applied between the substrate and the pedestal.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7888957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10304715-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005057881-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9025305-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010038983-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8771210-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005099758-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9865434-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11053581-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7355420-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005194983-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10679885-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011147338-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8410806-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6946403-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10336656-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8052629-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6682627-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8639455-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010039052-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9721821-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11179965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010204620-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7492172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7492175-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8679040-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10056284-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6084763-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10267848-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9669653-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I583606-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7723999-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8353854-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11476146-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11088005-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10179078-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734202-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7420381-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7761983-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7761986-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11047035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8293649-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9666466-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8585844-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7764072-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10020218-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8941969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8013623-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003033116-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7759953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7750652-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11279661-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011151669-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8274244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005041364-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6853953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010323124-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6427313-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9604249-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11769683-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6206352-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7940069-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010318006-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008169588-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7681312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9394615-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7688091-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7688097-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7072165-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7072166-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9889058-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543187-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7688062-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7898273-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7898281-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009306548-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10364197-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2466633-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7365463-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7893704-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9887121-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11680308-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9131873-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6606234-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9668393-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8879233-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11007105-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10501843-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8861170-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7969173-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8319503-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10679884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005052817-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7138813-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10395963-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007108161-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9358702-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9343289-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8069491-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10541171-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8097105-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007155557-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009204038-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114326-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9685356-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006155390-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9991148-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8263495-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8058823-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008195005-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9429638-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6947274-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9034199-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9212099-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009161285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9474673-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7811189-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8451017-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9916998-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10177023-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010147856-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010147856-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9090046-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7656172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7876114-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7876115-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010247804-A1
priorityDate 1995-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5792562-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4480284-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0339903-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707770
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425188129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5143
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69460
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457619101
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419532137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129832748
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6629
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7980
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457834615
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6144
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410749991
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410940591
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128466514

Total number of triples: 176.