http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8861170-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6875
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00
filingDate 2012-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c40c6a16507ecb7b2f7bbbbc96593ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b30631ed8818fb9f0eeb86aaeb1f7d13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a4989456e9a28319e86925164979a38
publicationDate 2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8861170-B2
titleOfInvention Electrostatic chuck with photo-patternable soft protrusion contact surface
abstract In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015294891-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022063035-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9939737-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9721821-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543187-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015370178-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11612972-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10395963-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9025305-B2
priorityDate 2009-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7078655-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0035003-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0019592-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007128570-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6055150-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9952144-A9
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6134096-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007109714-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008062612-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004027839-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6104595-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6490145-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9948148-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6259592-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007253139-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070066890-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5886866-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002144786-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002144657-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9962115-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6088213-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6721162-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5310453-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7052553-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9954928-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5880924-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6051122-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9957753-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002167779-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9916122-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6217655-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7824498-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5701228-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6723274-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1119040-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007258184-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060081562-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6475336-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5908334-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007064435-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005029244-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012033922-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005018377-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008062609-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005106320-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002135969-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03008666-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007258186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008088471-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5740009-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4184188-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004059714-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008106842-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007047170-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004190215-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010132640-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012044609-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5800871-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009142710-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003060020-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005095410-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007043519-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6414834-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005079737-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004055709-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6839217-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE37294-E
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006108231-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006112969-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5413360-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002012219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5792562-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1801961-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007223173-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006060234-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6982125-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003165043-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5656093-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7220319-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007194320-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013070384-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5870271-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6338861-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008062610-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6175485-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0231219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002141404-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011149918-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005119802-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03003449-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004059701-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008083700-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6452775-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002036373-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007217114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008037195-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004121192-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6104596-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5825607-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5916689-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003010292-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002299425-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005069726-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5946183-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6081414-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008062611-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5691876-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003282688-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0142163-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6108189-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5583736-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6117246-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005045106-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009284894-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004173469-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009242544-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6754062-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID31155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID77987
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6556
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16204749
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9863
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128242511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549006
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID31155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422601621
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425270609
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69667
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129581052

Total number of triples: 161.