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filingDate 2013-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b30631ed8818fb9f0eeb86aaeb1f7d13
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publicationDate 2015-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015294891-A1
titleOfInvention Electrostatic Chuck With Photo-Patternable Soft Protrusion Contact Surface
abstract In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.
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