| abstract |
An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body. According to a particular feature of this embodiment, the aluminum nitride has a resistivity ratio ρ 10V /ρ 500V less than about 5. In this regard, ρ 10V represents the resistivity of the electrostatic chuck at 10 applied volts while ρ 500V represents the resistivity of the AlN material at 500 applied volts. |