| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_855bc6c2798b52adac4beb0a2cfcc34a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16188c77e1e30468857aca46f3dcf194 |
| publicationDate |
2017-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9685356-B2 |
| titleOfInvention |
Substrate support assembly having metal bonded protective layer |
| abstract |
A substrate support assembly comprises a ceramic body and a thermally conductive base bonded to a lower surface of the ceramic body. The substrate support assembly further comprises a protective layer metal bonded to an upper surface of the ceramic body, wherein the protective layer is a bulk sintered ceramic article. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11192323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11712745-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10688750-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11075104-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020035535-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11456161-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11227786-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019013230-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11651987-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847402-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11699611-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022143726-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11380572-B2 |
| priorityDate |
2012-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |