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filingDate 2003-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2003-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2003170415-A1
titleOfInvention Ceramic substrate
abstract An object of the present invention is to provide an optimum ceramic substrate being excellent in temperature rising property and breakdown voltage and Young's modulus at a high temperature as a substrate for producing/examining a semiconductor, and in the ceramic substrate of the present invention having a conductor on a surface or inside thereof, the ceramic substrate has a leakage quantity of 10 −7 Pa·m 3 /sec (He) or less by measurement with a helium leakage detector.
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