http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08172786-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 1995-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a43ecfbf94713f896098cd2e91eab47f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3406c6d61d3f2e890b5d3349827a3bbe |
| publicationDate | 1996-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08172786-A |
| titleOfInvention | Electrostatic chuck with improved corrosion resistance |
| abstract | (57) Abstract: An electrostatic chuck having substantial resistance to corrosion in a corrosive gaseous environment containing gas is provided. An electrostatic chuck of the present invention includes an insulator, (I) comprises itself an electrode, (ii) a central portion overlying the electrode for supporting the substrate on itself, and (iii) a peripheral portion extending beyond the electrode. In one form of the invention, the central portion of the insulator is raised relative to the peripheral portion of the lower insulator. The raised central portion and the lower peripheral portion form a step having a height H of less than about 10 μm, more preferably less than about 5 μm to reduce corrosion of the insulator. Also, in one chuck configuration, a peripheral portion of the insulator extends beyond the electrode and has a width W. The width W of the peripheral portion of the insulator is at least about 2 mm, more preferably about 3 mm, to reduce corrosion of the insulator. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001251871-A |
| priorityDate | 1994-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.