| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B7-0075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B7-2491
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D1-09 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D1-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B7-00 |
| filingDate |
2018-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88cbb749fbdeb99c939c197cc20440ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73522e142b8ae3924888ccebacd20e41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3cdd437e0d8dd3641fdc70471fba442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5b0bd733c7b750e2fd5ae13190036f4 |
| publicationDate |
2018-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2018250695-A1 |
| titleOfInvention |
Apparatus for Increasing Flux from an Ampoule |
| abstract |
Ampoules for a semiconductor manufacturing precursors and methods of use are described. The ampoules include a container with an inlet port and an outlet port. The inlet port has a showerhead that the end within the container. The showerhead has at least two angled nozzles to direct the flow of gas within the cavity so that the gas flow is not perpendicular to the surface of a liquid within the ampoule. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11505863-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11270911-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587873-B2 |
| priorityDate |
2017-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |