| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49826 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67748
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68792
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68728
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2000-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a36ceb0d87f22349d6c3e70c22272c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cd74fcbdc0a922a7170bb50ac76761c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15679a6cb37b60a3098911848575bbbc |
| publicationDate |
2004-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1065702-A3 |
| titleOfInvention |
Silicon carbide sleeve for substrate support assembly |
| abstract |
An apparatus for and method of supporting a substrate such as a semiconductor wafer.nSilicon carbide sleeves cover substrate support members such as upwardly extending arms ofna substrate carrier which is part of a substrate support assembly. The substrate carriernincluding the upwardly extending arms holds the substrate spaced apart from a platform suchnas a susceptor during loading and unloading of a processing chamber. The platform definesnapertures through which the arms extend. The arms are vertically movable through thenapertures with respect to the platform and engage the substrate at the substrate's edge ornalternatively, inwardly from the edge. |
| priorityDate |
1999-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |