| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13094df619a067acc0e3f8e79df6e823
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_64ca3569e14fda2020dd2f306dc26dcc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3531908271dfacd1feee539f044426fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_086c03d1d33c3849d2c3690c05d2df79 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2038-1891 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B38-1833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14634
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B37-1284 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B37-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C39-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B38-18 |
| filingDate |
2004-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9325d2a21a0b62388ec823a69c26357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2244c10fc37d4842126a7de306eaa8a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9bd3b2d01ffec3470e24c8395560010
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1408c4005debaa39876846cc5dbc3734 |
| publicationDate |
2007-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007187868-A1 |
| titleOfInvention |
Pasting method and pasting apparatus |
| abstract |
A pasting method and a pasting apparatus hold a thin plate 1 and a planar member 2 in high flatness respectively on a first holding member 44 and a second holding member 44 , a main controller 40 a controls a moving mechanism 45 and a parallelism adjusting mechanism 52 on the basis of information provided by position recognizing mechanisms 33 and 34 to align the thin plate 1 and the carrying member 2 with each other in a predetermined positional relation. The main controller 40 a controls a moving mechanism 45 so as to move the thin plate 1 and the carrying member 2 relative to each other in a state where a liquid-phase liquid crystal wax heated by a heater 49 is held between the thin plate 1 and the carrying member 2 to spread the liquid-phase liquid crystal wax over the entire surfaces of the thin plate 1 and the carrying member 2 . Thus the thin plate 1 , such as a semiconductor wafer or a metal foil, can be accurately, surely and efficiently pasted to the carrying member 2 , and the thin plate 1 pasted to the carrying member 2 can be readily separated from the carrying member 2. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104759974-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I468787-B |
| priorityDate |
2003-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |