| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2887 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2001-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100843836-B1 |
| titleOfInvention |
Chuck Device and Chuck Method |
| abstract |
The mounting surface of the chuck is divided into a plurality of regions by the groove. A flow path is formed in the chuck. One end of these flow paths is opened into the inside of each groove and the other end is opened to the outer surface of the chuck. The other end of this flow path is connected to the gas cylinder and the vacuum exhaust mechanism via a solenoid valve so as to be switchable. |
| priorityDate |
2000-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |