| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8381805eba6d034fc77bd230dd02e6e2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S425-808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41M1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S425-06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67282 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C45-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41M1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A23G1-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A23G3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A01J25-13 |
| filingDate |
2006-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db627eb14e4cbcb46ab040e900c7325c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6182686a1df426ad89a83c4af7e23e9 |
| publicationDate |
2010-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7665983-B2 |
| titleOfInvention |
Microcontact printing |
| abstract |
A microcontact printing tool having a print unit including a stamp head with a stamp and a wafer chuck for retaining a substrate. The stamp contained by the stamped head movable relative to the substrate by an actuator and a stage. A plurality of sensors detect the position of the stamp relative to substrate. A method of using the printing tool that includes a real-time feedback for consistent and accurate application of force during the printing of the substrate. The stamp head includes a pressure chamber carrying the stamp. The stamp backing is deflected prior to contact of the stamp with the substrate to form a minimum point and the stamp backing and the stamp is returned to a plane to create a printing propagation contact. An apparatus has a master backing and a stamping backing in close proximity and the stamp material drawn in through a vacuum. The stamp is separated from the master by use of a parting fluid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8261660-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8685295-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8580163-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012026927-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9618840-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010143726-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011100241-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11559979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011018158-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011014378-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10556421-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-202010013706-U1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011003023-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8377243-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014141167-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011089586-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9623589-B2 |
| priorityDate |
2002-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |