http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100372129-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| filingDate | 1997-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100372129-B1 |
| titleOfInvention | Silicon wafer carrier |
| abstract | The present invention relates to (a) 100 parts by weight of polyester, (5) 5 to 100 parts by weight of polyether esteramide, (c) 10 to 2500 ppm of an alkaline metal and (d) modified polyolefin based on (c) polyether esteramide. 40 parts by weight of the composition, the amount of volatile gas generated when the heat treatment at 150 ℃ 60 minutes is 10 ppm or less, the amount of alkaline metal eluted when 120 minutes immersion treatment in pure water of 80 ℃ The present invention relates to a silicon wafer carrier having ppm or less. According to the present invention, the amount of volatile gas generated and the amount of the eluted metal are suppressed so as not to substantially cause surface contamination of the silicon wafer, so that a silicon wafer carrier having excellent permanent antistatic property, high mechanical properties and heat resistance can be provided. . |
| priorityDate | 1998-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 114.