| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2887
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-287
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07307 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2016-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_154c415f87459e249532e2ada9579e18 |
| publicationDate |
2021-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I720019-B |
| titleOfInvention |
Wafer inspection method and wafer inspection device |
| abstract |
Provide a wafer inspection method that can properly receive the top of the suction cupnlaw.nn n n n n After inspecting the wafer (W), in the alignern(32) When receiving the suction cup top (29), make the height of each suction cup top as the distance between the held suction cup top (29) and the suction cup base (49) equal to 0μm~ For any height of 200μm, adjust the tilt of the suction cup base (49) and adjust the distance between the suction cup top (29) and the suction cup base (49). |
| priorityDate |
2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |