| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00 |
| filingDate |
1997-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f89b88e9466c5e4f79d2f0908fa03ba3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fc2e008e999120f883b68e7004d39fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e66afa629e540f9c3ae46fc92e0e8971
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_626d972e0eb0ea1125dcfd37c9270caa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_226235355d5eeea9b50a716f355ad5b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7142bf1c6bda3ce70cadc9119c9c441
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b677976dcf36271b1259617131e01a92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_046cd5d5dce716a9e6048113553b211b |
| publicationDate |
1998-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0844659-A2 |
| titleOfInvention |
Puncture resistant electrostatic chuck |
| abstract |
A puncture resistant electrostatic chuck (20) is described. Thenchuck (20) comprises at least one electrode (25) ; and a composite insulatorn (30) covering the electrode. The composite insulator comprises a matrixnmaterial having a conformal holding surface (50) capable of conforming tonthe substrate (35) under application of an electrostatic force generated bynthe electrode to reduce leakage of heat transfer fluid held between thensubstrate and the holding surface. A hard puncture resistant layer, such anlayer of fibers or an aromatic polyamide layer, is positioned below the holdingnsurface (50) and is sufficiently hard to increase the puncture resistance ofnthe composite insulator. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022189087-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0948042-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008005617-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1005077-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4057068-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1005077-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004064122-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7736462-B2 |
| priorityDate |
1996-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |