| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5abd4444e2fcd867f8d9eeea7f6c34b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 |
| filingDate |
2018-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa402e6130416909d2bf33fb41f118c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d097f29ee02931a3853acc719da14ae7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37ec75533669e2ee8bcb549760993a7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12dfabc23cd6a0ed2246ebae606bd373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e41aa700415b153a6c5a81d74238d43 |
| publicationDate |
2019-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2019164800-A1 |
| titleOfInvention |
On the fly automatic wafer centering method and apparatus |
| abstract |
A Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11776834-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4004971-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11164769-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021305076-A1 |
| priorityDate |
2015-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |