http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105161437-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0133 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-019 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00928 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-682 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 |
| filingDate | 2015-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105161437-B |
| titleOfInvention | The glass or the micro-structural alignment of quartz chip and pre- bonding method of plasmaassisted |
| abstract | The glass or the micro-structural alignment of quartz chip and pre- bonding method of plasmaassisted, belong to chip micro Process and bonding techniques.Its step is as follows：Glass or quartz chip optical cement layer and layers of chrome are removed completely, and surface is fully cleaned using liquid detergent and a large amount of ultra-pure waters.Surface clean and activation are carried out using plasma cleaner, makes surface that there is high-hydrophilic；Under anhydrous condition, using micro- sem observation, substrate and cover plate after mobile cleaning, accurate alignment is completed.Very small amount ultra-pure water is instilled in edge slot to be bonded, and fully after pressure extrusion excessive moisture, by whole moisture in the vacuum function discharge chip of plasma cleaner, completes the micro-structural alignment of glass or quartz chip and pre- bonding.The permanent bonding of chip is further completed using the method for thermal bonding.This method causes alignment and pre- bonding, integrated operation time to be completed in 30min.Rapidly and efficiently, it is easy to implement, is safe operation, widely applicable. |
| priorityDate | 2015-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.