| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
1998-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f89b88e9466c5e4f79d2f0908fa03ba3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5aed1da81f48b2f829185b30d4ed234d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_162ec3ffbbedfcdcf08da709ffbd65f0 |
| publicationDate |
1998-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10313048-A |
| titleOfInvention |
Electrostatic chuck with one-way conductive coupler layer |
| abstract |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which provides a safe and high conductive electrical connection, while having low leakage of electric charge to a surrounding chuck structure. SOLUTION: The chuck according to the present invention includes an electrostatic member, and the electrostatic member includes: (i) an electrode; (ii) an electrically insulating holding surface; i) an electric contact surface for conducting an electric quantity to the electrode. A one-way conducting coupler layer is adhered to the contact surface so as to conduct the electric charge only in one direction from the voltage supply terminal to the contact surface and to provide the electrode with electricity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008277847-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000188321-A |
| priorityDate |
1997-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |