http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000016297-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1374dd16777534b65ad4422333245af8 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| filingDate | 1997-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1189d347f7f76f7e6a70fe45c65f7839 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2b760476fea0ba1d49eb07e7ee810ee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed50006de0f841ff1fec15c608348534 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a2e64247fd148dd6905ec6d0e46e8b0 |
| publicationDate | 2000-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20000016297-A |
| titleOfInvention | Silicon wafer carrier |
| abstract | The present invention relates to (a) 100 parts by weight of polyester, (5) 5 to 100 parts by weight of polyether esteramide, (c) 10 to 2500 ppm of an alkaline metal and (d) modified polyolefin based on (c) polyether esteramide. 40 parts by weight of the composition, the amount of volatile gas generated when the heat treatment at 150 ℃ for 60 minutes is 10 ppm or less, the amount of alkaline metal eluted when 120 minutes immersion in 80 ℃ pure water The following relates to a silicon wafer carrier. According to the present invention, the amount of volatile gas generated and the amount of elution metal are suppressed so as not to substantially cause surface contamination of the silicon wafer, thereby providing a silicon wafer carrier having excellent permanent antistatic property, high mechanical properties, and heat resistance. . |
| priorityDate | 1998-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 116.