http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68363
Outgoing Links
| Predicate | Object |
|---|---|
| level | 11^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | H01L2221/68363 |
| modified | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used in a transfer process involving transfer directly from an origin substrate to a target substrate without use of an intermediate handle substrate |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68304 |
Incoming Links
Total number of triples: 1966.