| abstract |
An improved method of fabricating a microsystem that integrates microfluidic channels aligned with other electronic or optoelectronic devices on one platform is provided at a lower cost and easier. A method for forming an integrated microelectronic device and a microchannel is provided. The method provides an inexpensive way to integrate devices, microchannels, and microelectronic structures, such as electro-optic light sources, detectors, or MEMS devices, that are typically incompatible with each other during fabrication into one integrated structure. [Selection diagram] Fig. 1 |