http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76237
Outgoing Links
Predicate | Object |
---|---|
concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
level | 13^^<http://www.w3.org/2001/XMLSchema#integer> |
symbol | H01L21/76237 |
modified | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
title | Dielectric regions using trench refilling with dielectric materials introducing impurities in trench side or bottom walls, e.g. for forming channel stoppers or alter isolation behavior |
type | http://data.epo.org/linked-data/def/cpc/SubGroup |
broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
Incoming Links
Total number of triples: 1867.