http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200913021-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823878 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823892 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24528 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20207 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76237 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26586 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 |
| filingDate | 2008-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39bf6520294a7087c32568786cc1e608 |
| publicationDate | 2009-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200913021-A |
| titleOfInvention | Ion implantation method and semiconductor device manufacturing method |
| abstract | In the ion implantation method and semiconductor device manufacturing method relating to the present invention, a disc on which multiple semiconductor substrates are mounted is positioned in the manner that a first angle β 1 is made between an X-Y plane perpendicular to an ion beam and a line perpendicular to the Y-axis in a disc rotation plane. In this state, an ion beam is emitted to implant a first conductivity type impurity in the semiconductor substrates while the disc is rotated about a disc rotation axis. Then, the disc is positioned in the manner that a second angle β 2 is made between the X-Y plane and a line perpendicular to the Y-axis in the disc rotation plane. In this state, an ion beam is emitted to implant a second conductivity type impurity in the semiconductor substrates while the disc is rotated about the disc rotation axis. |
| priorityDate | 2007-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6326954 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523132 |
Total number of triples: 21.