http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020266101-A1

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filingDate 2020-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2020266101-A1
titleOfInvention Integrated circuit devices and method of manufacturing the same
abstract An integrated circuit device includes a fin-type active region extending on a substrate in a first direction parallel to a top surface of the substrate; a gate structure extending on the fin-type active region and extending in a second direction parallel to the top surface of the substrate and different from the first direction; and source/drain regions in a recess region extending from one side of the gate structure into the fin-type active region, the source/drain regions including an upper semiconductor layer on an inner wall of the recess region, having a first impurity concentration, and including a gap; and a gap-fill semiconductor layer, which fills the gap and has a second impurity concentration that is greater than the first impurity concentration.
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