| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_371290089320f9469a0809aea17b2a22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bf44eabe9ec2795b5e0bfc9ddeaf3f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_942b5507e43faa778b6a4bdc0c59408a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a1288fbad315b84bf0606c0a20a343b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-342
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 |
| filingDate |
2010-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94556ae1bf14c8ce2dc0e763413e6b69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f961142a510e83a3304efc061c368cfe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61af122d0323a6fd7caffd4ae0eb3f09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04c4b9a0a746b13cc57cb25a94a911e8 |
| publicationDate |
2011-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011005433-A2 |
| titleOfInvention |
Boron film interface engineering |
| abstract |
Methods of depositing boron-containing liner layers on substrates involve the formation of a bilayer including an initiation layer which includes barrier material to inhibit the diffusion of boron from the bilayer into the underlying substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8617938-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016195983-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014041975-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10128088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10930475-B2 |
| priorityDate |
2009-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |