patentcpc/H01L21-67161

http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67161

Outgoing Links

Predicate	Object
concordantIPC	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
level	12^^<http://www.w3.org/2001/XMLSchema#integer>
symbol	H01L21/67161
modified	2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
title	Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
type	http://data.epo.org/linked-data/def/cpc/SubGroup
broader	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67155

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broader	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67178 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67173

Total number of triples: 1057.