| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67196
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67173 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2002-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_103f7da302f77c65b924e9bcbf2701c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6eb4286092af85fbad25c75eb4175e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b1a9815764f9fc4e295759de4ef5c5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fc54af807d8695aae80d1cab2a82228 |
| publicationDate |
2008-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I301291-B |
| titleOfInvention |
Method of a single wafer wet/dry cleaning apparatus |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I473663-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I646612-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I772893-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11786947-B2 |
| priorityDate |
2001-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |