http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003219912-A1

Outgoing Links

Predicate Object
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-906
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-12
filingDate 2002-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d49293df8f203c1aaa65a35a98d2ccd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20d69a30741cdf0035a1a65ed72bdf16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be24c42915a5be22182119b400c12b29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_faffff5fef7b07b9c3a8381822a726e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9314b3ada18585c71018c37ed86da306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c97af53da6a8e623cc003a10b050dfb3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaffc067902782a0853d687a002b8fb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e4895cda174fe3575c26fcaa98d9585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b06847d9b1b613b927228d1d47f01ff7
publicationDate 2003-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2003219912-A1
titleOfInvention Method for removal of metallic residue after plasma etching of a metal layer
abstract A method for removal of metallic residue from a substrate after a plasma etch process in a semiconductor substrate processing system by cleaning the substrate in a hydrogen fluoride solution.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110098321-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4020606-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006102197-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10777738-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110741488-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10615368-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010062590-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018198091-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10858727-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110098216-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6777334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006118516-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8304349-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8546263-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007010031-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10461251-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I602241-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006263730-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010041236-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004237997-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005191584-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7776755-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006289389-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019040504-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7442319-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8278122-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7259024-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007178705-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9882124-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935633-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007163997-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7927500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006263729-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006032833-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7267127-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006030645-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004018732-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011189796-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022048762-A1
priorityDate 2002-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6830628-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5800632-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6207565-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6627548-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5017513-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001051440-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5681398-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6984585-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6562726-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006270242-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6453914-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4446115-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5391511-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005279381-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6893893-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6129091-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5650041-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007051700-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6074961-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5277835-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6936544-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6245650-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6329299-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6315913-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5837662-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002119245-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5981454-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6235693-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6174818-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6589882-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129327014
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712843
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415877653
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID213013
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6373
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25135
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546198
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6393

Total number of triples: 111.