http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002119245-A1

Outgoing Links

Predicate Object
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26
filingDate 2002-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9beda2eda2cd9f012a3ebe9157f04d76
publicationDate 2002-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2002119245-A1
titleOfInvention Method for etching electronic components containing tantalum
abstract The present invention provides methods of wet processing electronic components having surfaces containing tantalum. In the methods of the present invention, tantalum-containing electronic components are contacted with a tantalum processing fluid comprising a tantalum oxidizing solution containing an oxidizing agent and a fluorine ion producing agent.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8084289-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008110748-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101173692-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008261847-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10340350-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008081485-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10431464-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016018358-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007095366-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101223154-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009253268-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006031250-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013244422-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7960328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011081785-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10741748-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1674598-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10002831-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8398779-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009212021-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9685406-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8389418-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7914623-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11404311-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10741397-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I471935-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642526-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315830-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003219912-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006054595-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011212567-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10319783-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9806023-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1946358-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1946358-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102194836-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006131277-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8791014-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7846349-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9771550-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7320942-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10074725-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10672653-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9917137-B1
priorityDate 2001-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6177026-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6083840-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4206541-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6261845-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5949126-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6329299-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24823
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23956
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6336889
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12233
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127406501
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559478
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24425
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452260893
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6375
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524982
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24445
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82832
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416641266
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62687
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129396299
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6368
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6405
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12223
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415881346
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453327643
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531072
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78976
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID221051
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24345
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521511
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID944
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7915
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127917382
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419656535
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129453277
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID115022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16212546
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557048
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128643247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28179
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12695
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128559611
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524198
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518568
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6428
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524207
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128558711
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127414258
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6278
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128296525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515535
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527158

Total number of triples: 125.