| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a7f1fbca987ca06526bf4ddc9f4186b3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02K2201-18 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67709
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D3-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G35-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67196
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67727
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02K41-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G54-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67715 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02K41-025 |
| filingDate |
2021-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c96ccc73d1606b4b8cbf7f1e89c68c28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6dc4cb8f93aec785dc80994bab636103 |
| publicationDate |
2022-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20220143105-A |
| titleOfInvention |
substrate processing equipment |
| abstract |
A linear electrical machine includes a frame having a level reference plane and an array of electromagnets coupled to the frame to form a drive plane at a predetermined height relative to the level reference plane. The array of electromagnets is arranged such that a series of electromagnets of the array form at least one drive line within the drive plane, each of the electromagnets being coupled to an alternating current power source that powers a respective electromagnet. At least one reaction platen of a paramagnetic, diamagnetic, or non-magnetic conductive material is configured such that excitation of the electromagnets by alternating current causes the reaction platen to be placed in a controlled posture relative to the drive plane. arranged to cooperate with the electromagnets of the array of electromagnets to create a levitation and propulsion force for the reaction platen that controllably floats and propels along a drive line. |
| priorityDate |
2020-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |