| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20228 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-023 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2007-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bdeba161a810bdde0b0cc297a17746f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_786a3d48aff89e7d8d2b6200f9d53bb8 |
| publicationDate |
2007-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007209591-A1 |
| titleOfInvention |
Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method |
| abstract |
A substrate processing system which enables a minute pieces of foreign matter attached to a substrate surface to be detected and are suitable for mass production of substrates. The substrate processing system has a substrate processing apparatus that carries out predetermined processing on a substrate. The substrate processing system comprises a substrate surface processing apparatus having a fluid supply unit that supplies onto a surface of the substrate a fluid containing an altering substance that alters a substance exposed at the surface of the substrate, and a substrate surface inspecting apparatus that inspects the surface of the substrate onto which the fluid has been supplied. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8210742-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11605553-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010314076-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018118398-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8302554-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008075853-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111554601-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111554601-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016035563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021287907-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7803419-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010136489-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8243265-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11651966-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I394992-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011058157-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010018332-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10840121-B2 |
| priorityDate |
2006-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |