| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c30e4c6b3615c3a5d796facd9cf063a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_545971b31cc3212f1f6b42bad3753cba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5ce5b2b36c171b92961800b1584fc715 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-94 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 |
| filingDate |
2009-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cffed8731093ddcfa4759b0dfc4f92e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8b4c2bd3430ee4d7723b2a21e7b39df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_788bf5d9ab446cca68159dc6f0cc836b |
| publicationDate |
2012-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8243265-B2 |
| titleOfInvention |
Method and apparatus for detecting foreign materials and storage medium |
| abstract |
A foreign material detecting method for detecting a foreign material attached to a substrate surface includes a spraying step of spraying an organic solvent or an oil-phase material containing a halogen element to the substrate surface, a condensing step of emphasizing the foreign material by condensing the sprayed organic solvent or oil-phase material around the foreign material attached to the substrate surface by controlling a temperature of the substrate surface, and a surface inspecting step of detecting the foreign material emphasized by the condensation of the organic solvent or the oil-phase material by a surface inspecting device. |
| priorityDate |
2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |