| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01M99-002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M99-00 |
| filingDate |
2009-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_124605f184cacf24d1ec01748a229026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_786a3d48aff89e7d8d2b6200f9d53bb8 |
| publicationDate |
2010-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010018332-A1 |
| titleOfInvention |
Method and apparatus for detecting foreign matter attached to peripheral edge of substrate, and storage medium |
| abstract |
A foreign matter detecting method of detecting foreign matter attached to a peripheral edge of a substrate, which makes it possible to accurately detect foreign matter attached to the peripheral edge of the substrate even if the foreign matter is of a minute size below the detection limit of an existing measuring instrument, and which is highly versatile and suitable for mass production of substrates. The substrate is cooled to condense moisture around the foreign matter attached to the peripheral edge of the substrate, and then the condensed moisture is iced to grow an ice crystal. Then, the foreign matter attached to the peripheral edge of the substrate, which is emphasized by the ice crystal, is detected. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9304093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11521865-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011206411-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017367677-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013128916-A1 |
| priorityDate |
2008-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |